Hexapod Platform
The Hexapod is ideal for mounting small mirror systems (load capacity can be up to 500kg). It delivers high performance with outstanding precision, resolution and repeatability in six degrees of freedom. The unique feature of the hexapod compared to other mirror mounts, is the ability to move around any centre point the user defines, using parallel kinetics - all of the struts are involved in each degree of freedom. This allows total control of the exact area of illumination of the optical element. The centre of rotation is definable in software and does not necessarily have to coincide with any item of hardware.
XDS can offer special systems with very low vibration levels for Infra Red mirrors, and Optical Diagnostics on the storage ring as well as special KB mirror pairs, multiple mirrors in a single vessel and other complex optical arrangements.
Specifications
| Hexapod system | |
|---|---|
| Load Capacity | Up to 500kg |
| Vertical range | ± 25mm with 0.1µm encoder resolution |
| Lateral range | 25mm with 0.1µm encoder resolution |
| Angular range | ± 2° (± 40mrad) about each axis with 1µrad resolution |
| Linear repeatability | ± 0.4µm |
| Linear accuracy | < 1µm |
| Rotational accuracy | < 1µrad |
| Rotational repeatability | ± 1µrad |
Features
- Greater repeatability than stacked motion stages (serial kinematics)
- Stiff, six-strut support
- Ability to rotate about any defined centre point
- Extremely good repeatability around chosen centre point
- High resolution 0.1µm encoders
- Programmable scanning motions
- Six degrees of freedom
Compound motions and suspended components (e.g. vacuum pumps) may limit ranges of movement. Modifications are available for specific requirements.
Fine pitch motion can be offered on any axis by incorporating a flexure mount and Digital Piezo Transducer. Most commonly these are mounted in vacuum to provide fine pitch corrections. These can be integrated with an appropriate bean position monitor and control system to provide fast feedback on beam position. Angular resolution depends on the lever arm offered by the support flexure.
