Precision Slits
XDS Oxford’s UHV compatible precision slits can be used as a secondary source aperture. These slits are driven through a unitary flexure mechanism to provide symmetrical opening from a single actuation.
The flexure mechanism is driven by a precision linear drive and stepper motor drive onto a strain wave gearbox through a vacuum feedthrough. Depending on the size, shape and energy requirements of a particular beamline, the precision slits can be customised to suit specific needs. Options include:
- Conflat flange size DN100, DN160
- Blade material, edge type and thickness
- Cooled or uncooled blades
- Absolute or Incremental encoders
- Drain current measurement
- Available for one axis or two depending on requirements
Specifications
| Description | Precision Slits |
|---|---|
| Flange size | DN100CF/DN160CF |
| Range of slit aperture | 0 - 2000 µm |
| Slit blade width | ≤ 25 mm |
| Vacuum (UHV Compatible) | ≤ 1 x 10-9 mbar |
| Helium Leak Rate | ≤ 10 x 10-10 mbar l/sec |
| Translation | 2-phase bipolar stepper motor with strain wave gearbox |
| Motor connection | 12 way Trim Trio |
| Aperture resolution | ≤ 0.1 µm |
| Aperture repeatability | ≤ 0.5 µm |
| Aperture stability | ≤ 0.1 µm |
For further information on how we can meet your specific requirements, please contact us.
